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Service of SEMI Evaluation
UL Korea의 SEMI 안전규격 평가 서비스는 한국, 미국,
일본의 반도체 안전 규격분야의 우수한 엔지니어의
유기적인 활동으로 귀사 제품을 전세계의 SEMI 인증
요구를 만족시켜 최종 소비자들의 구매 요건 중 가장
안전하고 신뢰할 수 있는 제품을 공급 할 수 있도록 해 주어 반도체 시장에서 경쟁우위를 획득하도록 도와 드리고 있습니다.

반도체 제조 장비 업체에 있어서 SEMI S2는 반도체 제조 장비의 안전 지침 (Industrial Guidelines for Semiconductor Equipment) 은 반도체 제조사 (End User) 에게 안전하고 신뢰성 있는 장비를 공급하기위한 중요한 지표가 됩니다.

SEMI® Guidelines and Standards
Your success in the semiconductor equipment market will depend on your product conforming to leading edge semiconductor industry standards and guidelines. SEMI® (Semiconductor Equipment and Materials International) is a global organization with members from all key sectors of the semiconductor industry. The EHS (environmental health and safety) committee within SEMI’s International Standards division develops standards and guidelines that are accepted worldwide as providing state-of-the-art process equipment safety to an industry that demands quality products. The flagship guideline in Semi’s fleet of safety documents is SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment.

SEMI® Equipment Safety Guidelines

  • S1 Equipment Safety Labels
  • S2 Safety Guidelines for Semiconductor Manufacturing Equipment
  • S3 Heated Chemical Baths
  • S4 Segregation/Separation of Gas Cylinders Contained in Cabinets
  • S5 Flow-Limiting Devices
  • S6 Ventilation
  • S8 Ergonomics Engineering
  • S9 Electrical Design Verification Tests
  • S10 Risk Assessment
  • S11 Equipment Mini-environments
  • S12 Equipment Decontamination
  • S13 Operation and Maintenance Manuals
  • S14 Fire Risk Assessment and Mitigation
  • S15 Toxic and Flammable Gas Detection Systems
  • S16 Equipment Disposal
  • S17 Unmanned Transport Vehicle (UTV) Systems
  • S18 Silane Family Gases Handling
  • S19 Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
  • S20 Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control

반도체 장비의 종류

  • Abatement Equipment
  • Analysis/Measurement Equipment
  • Assembly Equipment
  • Chemical Chillers
  • Chemical Mechanical Planarization (CMP) Equipment
  • Chemical Mixing and Dispensing
  • Chemical Vapor Deposition (CVD) Equipment
  • Cleanroom Equipment
  • Cluster Tools
  • Commercial Processing Water Chillers
  • Cryo-pumps & Compressors
  • Defect Detection Equipment
  • Dry Etch/Strippers
  • Electric Industrial Control Equipment
  • Electrical and Electronic Test & Measurement Equipment
  • Elevators
  • Factory Automation Equipment
  • Film Thickness Equipment
  • Gas Handling Equipment
  • Heated Chemical Baths
  • Heating and Cooling Equipment
  • Indexers
  • Industrial Control Equipment
  • Industrial Machinery
    • Information Technology Equipment
  • Ion Implantation Equipment
    • Laboratory Equipment
  • Lasers & Laser Equipment
    • Manipulators
  • Motor Operated Appliances
  • Motor-Operated Air Compressors, Vacuum Pumps
  • Physical Vapor Deposition (PVD) Equipment
  • Power Supplies
  • Prealigners
  • Probe Stations
  • Process Control Equipment
  • Production Equipment
  • Recirculators
  • Refrigeration and Air-Conditioning Compressor Units
  • Robots & Robotic Equipment
  • Spin/Rinse Driers
  • Standard Mechanical Interfacers (SMIF)
  • Surface Inspection/Flatness Equipment
  • Turbo Molecular Pumps
  • Uninterruptible Power Supply Equipment
  • Wafer Handling/Sorter/Storage
  • Water to Water Heat Exchangers
  • Wet cleaning/Etch Equipment